Item
|
Parameter
|
|
Measuring range
|
Z Axis(Vertical)
|
160μm
|
X Axis(Horizontal)
|
17.5mm
|
|
Resolution
|
Z Axis(Vertical)
|
0.01μm/±20μm
|
0.02μm/±40μm
|
||
0.04μm/±80μm
|
||
Measurement item
|
Parameters
|
Ra, Rq, Rz, Rt
|
Standard
|
ISO,GB
|
|
Filter
|
RC,PC-RC, Gauss, D-P
|
|
Sampling length (lr)
|
0.25, 0.8, 2.5mm
|
|
Assessment length( ln)
|
In=lr×n n=5
|
|
Pickup
|
principle
|
Differential inductance
|
Stylus
|
Natural Diamond, 90B cone angle, 5μm tip radius
|
|
Force
|
<4mN
|
|
Skid
|
Ruby, Longitudinal radius 40mm
|
|
Sliding speed
|
lr=0.25, Vt=0.135mm/s
|
|
lr=0.8, Vt=0. 5mm/s
|
||
lr=2. 5, Vt=1mm/s
|
||
Return, Vt=1mm/s
|
||
Accuracy
|
≤ ±10%
|
|
Repeatability
|
≤6%
|
|
Power supply
|
Built-in Lithium ion battery, AC adapter 8.4V,800mA
|
|
Dimensions
|
119×47×65mm
|
|
Weight
|
approximately 380g
|